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SPIE Proceedings [SPIE Medical Imaging II - Newport Beach, CA (Sunday 31 January 1988)] Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII - Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices
Mackens, U, Luethje, H, Mackens, U, Mund, F, Pongratz, S., Yanof, Arnold W.Volume:
923
Year:
1988
Language:
english
DOI:
10.1117/12.945627
File:
PDF, 2.62 MB
english, 1988