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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Vacuum UV Spectroscopic Ellipsometry and X-Ray Reflectance Combined on the same Platform for the Characterization of High-k Gate Dielectrics
Defranoux, Christophe, Bondaz, Alexis, Kitzinger, Laurent, Piel, Jean PhilippeVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2727401
File:
PDF, 570 KB
english, 2007