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Static and dynamic evaluation of Silicon-On-Insulator-based scanning micromirrors
You, Jianliang, Bhaskar, Avinash K., Packirisamy, Muthukumaran, Bhat, Rama B.Volume:
5
Year:
2008
Language:
english
Journal:
International Journal of Intelligent Systems Technologies and Applications
DOI:
10.1504/ijista.2008.018173
File:
PDF, 5.44 MB
english, 2008