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New technology MO PVD-arc multi-layer producing plasma atmosphere of Al(CH3)3 precursor
Betiuk, Marek, Burdynski, Kryspin, Nakonieczny, Aleksander, Przywoski, Andrzej, Szudrowicz, Marek, Baum, HartmutVolume:
2
Year:
2007
Language:
english
Journal:
International Journal of Microstructure and Materials Properties
DOI:
10.1504/ijmmp.2007.012941
File:
PDF, 1.26 MB
english, 2007