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Modelling and verification of XeF2 silicon micromachining
Floarea, George, Packirisamy, Muthukumaran, Stiharu, IonVolume:
3
Year:
2009
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2009.027051
File:
PDF, 624 KB
english, 2009