Modelling and verification of XeF2 silicon micromachining

Modelling and verification of XeF2 silicon micromachining

Floarea, George, Packirisamy, Muthukumaran, Stiharu, Ion
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Volume:
3
Year:
2009
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2009.027051
File:
PDF, 624 KB
english, 2009
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