Titanium oxidation by RF inductively coupled plasma

International Journal of Nanomanufacturing 2010 Vol. 5; Iss. 1/2

Titanium oxidation by RF inductively coupled plasma

Alvarado, R. Valencia, Callejas, R. Lopez, Barocio, S.R., Cabrera, A. Mercado, Eguiluz, R. Pena, Castro, A.E. Munoz, Beneitez, A. De la Piedad, Vazquez, J.M. De La Rosa
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Volume:
5
Year:
2010
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2010.029923
File:
PDF, 489 KB
english, 2010
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