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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII - Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions
Shea, Herbert R., Ramesham, Rajeshuni, Bandi, T., Baborowski, J., Dommann, A., Shea, H., Cardot, F., Neels, A.Volume:
8975
Year:
2014
Language:
english
DOI:
10.1117/12.2044209
File:
PDF, 1.09 MB
english, 2014