SPIE Proceedings [SPIE Third European Seminar on Precision...

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SPIE Proceedings [SPIE Third European Seminar on Precision Optics Manufacturing - Teisnach, Germany (Tuesday 12 April 2016)] Third European Seminar on Precision Optics Manufacturing - In plane laser-interferometric sensor

Rascher, Rolf, Fähnle, Oliver, Wünsche, Christine, Schopf, Christian, Langlotz, Enrico, Dontsov, Denis, Schott, Walter
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Volume:
10009
Year:
2016
Language:
english
DOI:
10.1117/12.2235860
File:
PDF, 674 KB
english, 2016
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