SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Optical interferometric characterization of membrane curvature in boron-doped Si microstructures
Weigold, Jason W., Juan, Wen Han, Pang, Stella W., Borenstein, Jeffrey T., Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
DOI:
10.1117/12.284474
File:
PDF, 818 KB
1997