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SPIE Proceedings [SPIE 17th Annual BACUS Photomask Technology and Management - Redwood City, CA (Wednesday 17 September 1997)] 17th Annual BACUS Symposium on Photomask Technology and Management - OPC technology road map to 0.14-μm design rules
Chen, J. Fung, Laidig, Thomas L., Wampler, Kurt E., Caldwell, Roger F., Naderi, Alex R., Van Den Broeke, Douglas J., Reynolds, James A., Grenon, Brian J.Volume:
3236
Year:
1998
Language:
english
DOI:
10.1117/12.301210
File:
PDF, 1.33 MB
english, 1998