SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Micromachined scanning Fabry-Perot interferometer
Zavracky, Paul M., Denis, K. L., Xie, H. K., Wester, Thomas E., Kelley, Paul L., French, Patrick J., Chau, Kevin H.Volume:
3514
Year:
1998
Language:
english
DOI:
10.1117/12.323885
File:
PDF, 2.05 MB
english, 1998