![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Intelligent Systems and Smart Manufacturing - Boston, MA (Sunday 5 November 2000)] Optomechanical Engineering 2000 - Design flow for MOEMS
Morris III, Arthur S., Bart, Stephen F., Kane, Derek, Lorenz, Gunar, Rabinovich, Vladimir L., Kahan, Mark A.Volume:
4198
Year:
2001
Language:
english
DOI:
10.1117/12.417352
File:
PDF, 529 KB
english, 2001