SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II - Microshutter arrays for near-infrared applications on the James Webb Space Telescope
Li, Mary J., Bier, Alex, Fettig, Rainer K., Franz, David E., Hu, R., King, T., Kutyrev, Alexander S., Lynch, Bernard A., Moseley, Samuel H., Mott, David B., Rapchun, David A., Silverberg, Robert F., SVolume:
4981
Year:
2003
Language:
english
DOI:
10.1117/12.476285
File:
PDF, 1.05 MB
english, 2003