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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Lithographic and Micromachining Techniques for Optical Component Fabrication II - Photo-induced surface relief on Azo polymer for optical component fabrication
Fukuda, Takashi, Kley, Ernst-Bernhard, Herzig, Hans Peter, Keum, Chang-Dae, Matsuda, Hiro, Yase, Kiyoshi, Tamada, KaoruVolume:
5183
Year:
2003
Language:
english
DOI:
10.1117/12.508289
File:
PDF, 931 KB
english, 2003