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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Investigation of a nucleation stage of macropore formation in p-type silicon
Starkov, V. V., Gavrilin, Eugene Y., Vyatkin, Anatoli F., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.557921
File:
PDF, 339 KB
english, 2012