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SPIE Proceedings [SPIE Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications - Ancona, Italy (Tuesday 22 June 2004)] Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications - Mechanical characterization of microelectronic structures by optical vibrational measurements
Drzik, Milan, Chlpik, JurajVolume:
5503
Year:
2004
Language:
english
DOI:
10.1117/12.579566
File:
PDF, 360 KB
english, 2004