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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 22 January 2005)] Photon Processing in Microelectronics and Photonics IV - Scope for electric field assisted removal of ablated debris from laser machined features in silicon
Fieret, Jim, Coyne, Edward, Mannion, Paul, Herman, Peter R., Okada, Tatsuo, O'Connor, Gerard M., Favre, Sebastian, Arnold, Craig B., Bachmann, Friedrich G., Glynn, Thomas J., Hoving, Willem, Washio, KVolume:
5713
Year:
2005
Language:
english
DOI:
10.1117/12.594529
File:
PDF, 1.01 MB
english, 2005