SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Metrology, Inspection, and Process Control for Microlithography XIX - Performance of measuring contact holes using the Opti-Probe 7341 3-D RT/CD technology
Sorkhabi, Osman, Silver, Richard M., Pois, Heath, Chu, Hanyou, Wen, Youxian, Opsal, Jon, Kim, Won D.Volume:
5752
Year:
2005
Language:
english
DOI:
10.1117/12.598955
File:
PDF, 616 KB
english, 2005