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SPIE Proceedings [SPIE Semiconductors '92 - Somerset, NJ (Sunday 22 March 1992)] Spectroscopic Characterization Techniques for Semiconductor Technology IV - Application of differential photoreflectance spectroscopy in selective modulation of a layer within multilayer device structures
Badakhshan, Alireza, Sydor, Michael, Alavi, Kambiz, Teraguchi, N., Morkoc, Hadis, Glembocki, Orest J.Volume:
1678
Year:
1992
Language:
english
DOI:
10.1117/12.60455
File:
PDF, 210 KB
english, 1992