SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Thermal stability of metal containing diamond-like carbon thin film fabricated by dual plasma deposition
Fu, Ricky K. Y., Mei, Y. F., Fu, M. Y., Wei, C. B., Siu, G. G., Chu, Paul K., Cheung, W. Y., Wong, S. P., Chu, Junhao, Lai, Zongsheng, Wang, Lianwei, Xu, ShaohuiYear:
2012
Language:
english
DOI:
10.1117/12.607377
File:
PDF, 523 KB
english, 2012