SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Optical Scanning 2005 - Novel 3D scanner based on electrostatically driven resonant micromirrors
Schelinski, Uwe, Bergmann, Andeas, Dallmann, Hans-Georg, Gerwig, Christian, Kleinmann, Ljudmila, Lakner, Hubert, Nauber, Petra, Neumann, Hannes, Scholles, Michael, Wolter, AlexanderVolume:
5873
Year:
2005
Language:
english
DOI:
10.1117/12.616486
File:
PDF, 507 KB
english, 2005