SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Micromachining Technology for Micro-Optics and Nano-Optics IV - Optimization of SU-8 processing for integrated optics
Anhoj, Thomas A., Johnson, Eric G., Nordin, Gregory P., Jorgensen, Anders M., Zauner, Dan A., Suleski, Thomas J., Hübner, JörgVolume:
6110
Year:
2006
Language:
english
DOI:
10.1117/12.646489
File:
PDF, 690 KB
english, 2006