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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] MEMS, MOEMS, and Micromachining II - Optical probing of nanoelectromechanical systems (NEMS)
Ekinci, K. L., Ürey, Hakan, El-Fatatry, Ayman, Karabacak, D., Kouh, T., Kim, D. H.Volume:
6186
Year:
2006
Language:
english
DOI:
10.1117/12.665299
File:
PDF, 512 KB
english, 2006