SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI - Cyclic thin film flexible pressure sensor testing
Lim, Hee C., Hartzell, Allyson L., Ramesham, Rajeshuni, Zunino III, James L., Federici, John F.Volume:
6463
Year:
2007
Language:
english
DOI:
10.1117/12.704223
File:
PDF, 567 KB
english, 2007