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SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Smart Sensors, Actuators, and MEMS III - Application of PZT thick-films on adjusting purposes in micro-optical systems
Bruchmann, C., Becker, Thomas, Cané, Carles, Höfer, B., Schreiber, P., Barker, N. Scott, Eberhardt, R., Buss, W., Peschel, T., Gebhardt, S., Tünnermann, A., Beckert, E.Volume:
6589
Year:
2007
Language:
english
DOI:
10.1117/12.722397
File:
PDF, 537 KB
english, 2007