SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Design for Manufacturability through Design-Process Integration III - Timing-aware metal fill for optimized timing impact and uniformity
Katakamsetty, Usha, Singh, Vivek K., Rieger, Michael L., Hui, Colin, Huang, Li-Da, Weng, Lannie, Wu, PeterVolume:
7275
Year:
2009
Language:
english
DOI:
10.1117/12.816476
File:
PDF, 1.16 MB
english, 2009