SPIE Proceedings [SPIE Medical Imaging II - Newport Beach, CA (Sunday 31 January 1988)] Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII - Nanolithography With Poly(3-Butenyltrimethylsilane Sulfone)
Gozdz, Antoni S., Lin, Paul S., Yanof, Arnold W.Volume:
923
Year:
1988
Language:
english
DOI:
10.1117/12.945646
File:
PDF, 12.47 MB
english, 1988