Al doping of 4H-SiC by laser irradiation to coated Al film and its application to junction barrier Schottky diode
Ikeda, Akihiro, Sumina, Rikuho, Ikenoue, Hiroshi, Asano, TanemasaVolume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.04ER07
Date:
April, 2016
File:
PDF, 2.48 MB
english, 2016