A new method for measuring the flatness of large and thin silicon substrates using a liquid immersion technique
Liu, Haijun, Dong, Zhigang, Huang, Han, Kang, Renke, Zhou, PingVolume:
26
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/26/11/115008
Date:
November, 2015
File:
PDF, 2.31 MB
english, 2015