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SPIE Proceedings [SPIE 13th Annual BACUS Symposium on Photomask Technology and Management - Santa Clara, CA (Wednesday 22 September 1993)] 13th Annual BACUS Symposium on Photomask Technology and Management - Direct phase measurement in phase-shift masks with a differential heterodyne interferometer
Fujita, Hiroshi, Miyashita, Hiroyuki, Nakamura, Hiroyuki, Sano, Hisatake, Kimura, Kasuhiko, Nakanishi, Hiroshi, Takizawa, Hideo, Yamaguchi, Hidehiko, Ode, Takahiro, Grady, Edward C., Moneta, Jack P.Volume:
2087
Year:
1994
Language:
english
DOI:
10.1117/12.167255
File:
PDF, 560 KB
english, 1994