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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Dimensional Optical Metrology and Inspection for Practical Applications II - Adaptive control system for improvement of contrast in interferograms
Veloz, Nicolás, González-Laprea, Jesús, Escalona, Rafael, Harding, Kevin G., Huang, Peisen S., Yoshizawa, ToruVolume:
8839
Year:
2013
Language:
english
DOI:
10.1117/12.2024136
File:
PDF, 541 KB
english, 2013