SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] MOEMS and Miniaturized Systems XIII - Efficient grating simulation for general incident beam
Piyawattanametha, Wibool, Park, Yong-Hwa, Zhang, Site, Wyrowski, Frank, Tervo, JaniVolume:
8977
Year:
2014
Language:
english
DOI:
10.1117/12.2039961
File:
PDF, 1.57 MB
english, 2014