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SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - New spatial frequency doubling method for sub-0.15-um optical lithography
Otaka, Akihiro, Kawai, Yoshio, Tanaka, Akinobu, Matsuda, Tadahito, Brunner, Timothy A.Volume:
2440
Year:
1995
Language:
english
DOI:
10.1117/12.209307
File:
PDF, 449 KB
english, 1995