SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Microelectronic Device and Multilevel Interconnection Technology - 15 ps cryogenic operation of 0.19-μm-LG n+ - p+ double-gate SOI CMOS
Sugii, Toshihiro, Tanaka, Tetsu, Horie, Hiroshi, Suzuki, Kunihiro, Chen, Ih-Chin, Dixit, Girish A., Doan, Trung T., Sasaki, NobuoVolume:
2636
Year:
1995
Language:
english
DOI:
10.1117/12.221150
File:
PDF, 583 KB
english, 1995