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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microelectronic Structures and MEMS for Optical Processing III - Design and development of microstructures for MEMS applications
Chandra, Sudhir, Singh, Janak, Chand, Ami, Motamedi, M. Edward, Herzig, Hans PeterVolume:
3226
Year:
1997
Language:
english
DOI:
10.1117/12.284571
File:
PDF, 1.29 MB
english, 1997