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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - Metrology for laser-structured microdevices by CCD-camera-based vision systems
Ostlender, Andreas, Puetz, Udo, Kreutz, Ernst-Wolfgang, Motamedi, M. Edward, Goering, RolfVolume:
4178
Year:
2000
Language:
english
DOI:
10.1117/12.396489
File:
PDF, 788 KB
english, 2000