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SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Thermal-induced stress in dielectric membranes suitable for micromechanized gas sensors
Puigcorbe, J., Vila, A., Gracia, Isabel, Cane, Carles, Morante, Juan R., Courtois, Bernard, Karam, Jean Michel, Levitan, Steven P., Markus, Karen W., Tay, Andrew A. O., Walker, James A.Volume:
4408
Year:
2001
Language:
english
DOI:
10.1117/12.425339
File:
PDF, 382 KB
english, 2001