SPIE Proceedings [SPIE Micromachining and Microfabrication...

  • Main
  • SPIE Proceedings [SPIE Micromachining...

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Single-crystal silicon triple-torsional micro-oscillators for use in magnetic resonance force microscopy

Chabot, Michelle D., Messina, Troy C., Mancevski, Vladimir, Miller, Casey W., Markert, John T., Helvajian, Henry, Janson, Siegfried W., Laermer, Franz
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4559
Year:
2001
Language:
english
DOI:
10.1117/12.443037
File:
PDF, 829 KB
english, 2001
Conversion to is in progress
Conversion to is failed