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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Single-crystal silicon triple-torsional micro-oscillators for use in magnetic resonance force microscopy
Chabot, Michelle D., Messina, Troy C., Mancevski, Vladimir, Miller, Casey W., Markert, John T., Helvajian, Henry, Janson, Siegfried W., Laermer, FranzVolume:
4559
Year:
2001
Language:
english
DOI:
10.1117/12.443037
File:
PDF, 829 KB
english, 2001