SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II - Fabrication of binary photomask by femtosecond laser

Stanley, Paul, Venkatakrishnan, Krishnan, Ngoi, Bryan K. A., Janson, Siegfried W.
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Volume:
4981
Year:
2003
Language:
english
DOI:
10.1117/12.478173
File:
PDF, 697 KB
english, 2003
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