SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Diamond Optics IV - Plasma parameters in microwave-plasma-assisted chemical vapor deposition of diamond
Weimer, Wayne A., Cerio, Frank M., Johnson, Curtis E., Feldman, Albert, Holly, SandorVolume:
1534
Year:
1991
Language:
english
DOI:
10.1117/12.48275
File:
PDF, 127 KB
english, 1991