SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - Analysis of parametric resonances in comb-driven microscanners
Ataman, Caglar, Urey, Hakan, El-Fatatry, Ayman, Kaya, Ozgur, Urey, HakanVolume:
5455
Year:
2004
Language:
english
DOI:
10.1117/12.547444
File:
PDF, 175 KB
english, 2004