SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12...

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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Modeling of phosphorous diffusion in ion-implanted Si at dopant transient enhanced out-diffusion during vacuum rapid thermal annealing

Kagadei, Valerii A., Markov, Alexey B., Valiev, Kamil A., Orlikovsky, Alexander A.
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Year:
2012
Language:
english
DOI:
10.1117/12.562665
File:
PDF, 243 KB
english, 2012
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