SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV - Universal fixture for assembling and testing of a silicon-based microcombustor
Jin, Yufeng, Tanner, Danelle M., Ramesham, Rajeshuni, Shan, Xue Chuan, Wang, Zhenfeng, Zhang, Haixia, Wong, Chee KhuenVolume:
5716
Year:
2005
Language:
english
DOI:
10.1117/12.588962
File:
PDF, 232 KB
english, 2005