SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Gray scaling in high performance optical pattern generators
Martinsson, Hans, Weed, J. Tracy, Martin, Patrick M., Sandstrom, TorVolume:
5992
Year:
2005
Language:
english
DOI:
10.1117/12.633395
File:
PDF, 1.40 MB
english, 2005