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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Capabilities of microinterferometer with digital recording of images for studying micro-objects with sub-nanometer resolution
Chkhalo, Nikolay I., Raskin, Denis G., Salashchenko, Nikolay N., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.802458
File:
PDF, 217 KB
english, 2012