SPIE Proceedings [SPIE Smart Materials, Nano-and Micro-Smart Systems - Melbourne, Australia (Tuesday 9 December 2008)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV - Dielectric performance of diamond-like carbon nanofilms deposited by electron-beam-induced deposition
Chiao, Jung-Chih, Balaur, Eugeniu, Peele, Andrew G., Hariz, Alex J., Thiel, David V., Yang, ChangyiVolume:
7269
Year:
2008
Language:
english
DOI:
10.1117/12.810690
File:
PDF, 1.35 MB
english, 2008