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SPIE Proceedings [SPIE SPIE OPTO: Integrated Optoelectronic Devices - San Jose, CA (Saturday 24 January 2009)] Silicon Photonics IV - Fabrication and tailoring of silicon photonic devices via focused ion beam
Howe, S., Kubby, Joel A., Reed, Graham T., Headley, W. R., Cox, D. C., Mashanovich, G. Z., Thomson, D. J., Reed, G. T.Volume:
7220
Year:
2009
Language:
english
DOI:
10.1117/12.811008
File:
PDF, 567 KB
english, 2009