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Surface finish improvement of an unpolished silicon wafer using micro-laser assisted machining
Mohammadi, Hossein, Poyraz, Hüseyin Bogaç, Ravindra, Deepak, Patten, John A.Volume:
7
Year:
2015
Language:
english
Journal:
International Journal of Abrasive Technology
DOI:
10.1504/ijat.2015.073805
File:
PDF, 781 KB
english, 2015