Model of reactive sputtering process in deposition of TiAlN coating
Budi, Esmar, Muhamad, Mohd. Razali Bin, Yahaya, Saifudin Hafiz Bin, Rahman, Md. Nizam Bin AbdulVolume:
2
Year:
2011
Language:
english
Journal:
International Journal of Materials Engineering Innovation
DOI:
10.1504/ijmatei.2011.037881
File:
PDF, 692 KB
english, 2011