Roughness characterisation of gas phase micromachining process suitable for fabricating silicon based microsystems
Packirisamy, M., Stiharu, I., Flores, L.Volume:
7
Year:
2005
Language:
english
Journal:
International Journal of Manufacturing Technology and Management
DOI:
10.1504/ijmtm.2005.006842
File:
PDF, 6.61 MB
english, 2005